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Goto, K., Konishi, K., Murakami, H., Kumagai, Y., Monemar, B., Higashiwaki, M., Kuramata, A., Yamakoshi, S. Halide vapor phase epitaxy of Si doped beta-Ga2O3 and its electrical properties. Thin Solid Films (Thin Solid Films) 666: 182-184, 2018.
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